The MPI TS150-THZ is designed for mechanical stability. It works without chuck elevation at frequencies higher that G band (220GHz) and shares the same unique concept of stage and probe platen lift like all MPI Manual TS150, TS200, and TS300 probe systems.
The MPI air-bearing stage design, with simple single-handed puck control, provides unsurpassed convenience of operation for fast XY navigation and quick wafer loading without compromising accurate and fine positioning capability with the additional fine and accurate 25x25mm XY-Theta micrometer movement.
Unique platen lift with Probe Hover Control™
The highly repeatable (1µm) platen lift design with three discrete positions for contact, separation (300µm), and loading (3mm) with a safety lock utility are all examples of unparalleled functionality incorporated into MPI TS150-THZ manual probe system. These features prevent….
TS150-THZ has 10mm fine chuck Z adjustment, designed to be flexible in the integration of different frequency extenders, like from Rohde & Schwarz, VDI or OML. Extremely beneficial for set-ups using several bended solutions on the same probe system – for easy and fast reset-up.
Multiple configurations of MicroPositioners
The dedicated and extremely rigid probe platen design accommodates two bold-down MP80 large area MicroPositioners in east-west configuration. Four port RF measurements or DC biasing is easy possible by having two North and South “bridges” as a standard configuration.
Another MPI pioneering solution on the market – the unique MP80-DX with easy and precise definition down to 1µm of Δl – is the ideal choice for accurate and cost-effective multiline TRL – the only RF calibration method in the mmW and sub-THz range. For more details, visit MPI QAlibria®software.
Courtesy of FBH
Various chuck options
The TS150-THZ is available with various chuck options to meet different budgets and application requirements such as MPI’s:…